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Artificial microbeams to sense air flow, temperature or humidity combining MEMS and CMOS technologies
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Document type | Communication à un colloque (Conference Paper) – Conférence invitée / Keynote |
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Publication date | 2008 |
Language | Anglais |
Conference | "Sensors and Sensing in Biology and Engineering Conference, October 12 – 16, 2008", Cetraro (Italy) (du 12/10/2008 au 16/10/2008) |
Peer reviewed | yes |
Publication status | Publié |
Affiliation | UCL - FSA/ELEC - Département d'électricité |
Keywords | MEMS ; CMOS |
Links |
Bibliographic reference | André, Nicolas ; Rue, Bertrand ; Renaux, Christian ; Raskin, Jean-Pierre ; Flandre, Denis. Artificial microbeams to sense air flow, temperature or humidity combining MEMS and CMOS technologies.Sensors and Sensing in Biology and Engineering Conference, October 12 – 16, 2008 (Cetraro (Italy), du 12/10/2008 au 16/10/2008). |
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Permanent URL | http://hdl.handle.net/2078.1/89933 |