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Nanomechanical testing of free-standing monocrystalline silicon beams
Primary tabs
| Document type | Communication à un colloque (Conference Paper) – Présentation orale avec comité de sélection |
|---|---|
| Publication date | 2011 |
| Language | Anglais |
| Conference | "219th ECS Meeting - Symposium E8 - Advanced Semiconductor-on-Insulator Technology and Related Physics", Montreal, Canada (du 01/05/2001 au 06/05/2011) |
| Peer reviewed | yes |
| Host document | "Proceedings of the 219th ECS Meeting"- p. paper #1446 |
| Publication status | Publié |
| Affiliations |
UCL
- SST/ICTM/ELEN - Pôle en ingénierie électrique UCL - SST/IMMC/IMAP - Materials and process engineering |
| Links |
| Bibliographic reference | Bhaskar, Umesh Kumar ; Houri, Samer ; Passi, Vikram ; Pardoen, Thomas ; Raskin, Jean-Pierre. Nanomechanical testing of free-standing monocrystalline silicon beams.219th ECS Meeting - Symposium E8 - Advanced Semiconductor-on-Insulator Technology and Related Physics (Montreal, Canada, du 01/05/2001 au 06/05/2011). In: Proceedings of the 219th ECS Meeting, 2011, p. paper #1446 |
|---|---|
| Permanent URL | http://hdl.handle.net/2078.1/78196 |