Laconte, J.
Rue, Bertrand
[UCL]
Raskin, Jean-Pierre
[UCL]
Flandre, Denis
[UCL]
The paper reports an improved low cost directional flow sensor, fully compatible with IC-CMOS SOI (silicon-on-insulator) processes, with fair sensitivity and short response time on a large airflow rate range (from 0 to 8 m/s) at a very low consumption (15 mW). Many different sensing principles can be found in the literature and impose a difficult choice between low power consumption, high airflow rate range, sufficient flow rate sensitivity and compatibility with IC processes. Our sensor challenges most recent realizations by providing attractive trade-offs between these parameters for a large range of applications.
Bibliographic reference |
Laconte, J. ; Rue, Bertrand ; Raskin, Jean-Pierre ; Flandre, Denis. Fully CMOS-SOI compatible low-power directional flow sensor.Proceedings of the IEEE Sensors 2004 (Vienna (Austria)). In: Rocha, D.; Sarro, P.M.; Vellekoop, M.J.;, Proceedings of the IEEE Sensors 2004 (IEEE Cat. No.04CH37603), IEEE2004, p.Vol. 2, p. 864-7 |
Permanent URL |
http://hdl.handle.net/2078.1/67970 |