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Comparative-study of Nb and Tiw Barrier Layers Between Au and A-sio2
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Document type | Article de périodique (Journal article) – Article de recherche |
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Publication date | 1984 |
Language | Anglais |
Journal information | "Journal of Vacuum Science and Technology. Part A. Vacuum, Surfaces and Films" - Vol. 2, no. 2, p. 288-291 (1984) |
Peer reviewed | yes |
Publisher | Amer Inst Physics (Woodbury) |
issn | 0734-2101 |
Publication status | Publié |
Affiliation | UCL |
Links |
Bibliographic reference | Liehr, M. ; Delrue, JP. ; Caudano, Roland ; Herbots, N. ; Vandenberghe, RAL. ; et. al. Comparative-study of Nb and Tiw Barrier Layers Between Au and A-sio2. In: Journal of Vacuum Science and Technology. Part A. Vacuum, Surfaces and Films, Vol. 2, no. 2, p. 288-291 (1984) |
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Permanent URL | http://hdl.handle.net/2078.1/56358 |