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Study of the Sputter Rate of Thin Aluminum Layers Deposited On Polymer (pet) Substrates
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Document type | Article de périodique (Journal article) – Article de recherche |
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Access type | Accès restreint |
Publication date | 1989 |
Language | Anglais |
Journal information | "Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms" - Vol. 39, no. 1-4, p. 86-90 (1989) |
Peer reviewed | yes |
Publisher | Elsevier Science Bv (Amsterdam) |
issn | 0168-583X |
e-issn | 1872-9584 |
Publication status | Publié |
Affiliation | UCL - FSA/MAPR - Département des sciences des matériaux et des procédés |
Links |
Bibliographic reference | Depuydt, Y. ; Bertrand, Patrick. Study of the Sputter Rate of Thin Aluminum Layers Deposited On Polymer (pet) Substrates. In: Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, Vol. 39, no. 1-4, p. 86-90 (1989) |
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Permanent URL | http://hdl.handle.net/2078.1/52521 |