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Properties of titanium based hard coatings deposited by the cathodic arc method I. Microchemical and microstructural characteristics

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Balaceanu, M Braic, M Macovei, D Genet, MJ. Manea, A Negoita, F

TiN, TiC and Ti(C,N) hard coatings were deposited on Si substrates by a cathodic are system. Various investigation techniques (ERDA, XPS, and XRD) were used to analyze the microchemical and microstructural characteristics of the films (surface chemistry, chemical composition, texture) prepared under different deposition conditions.

Document type Article de périodique (Journal article) – Article de recherche
Publication date 2002
Language Anglais
Journal information "Journal of Optoelectronics and Advanced Materials" - Vol. 4, no. 1, p. 107-114 (2002)
Peer reviewed yes
Publisher Natl Inst Optoelectronics (Bucharest-magurele)
issn 1454-4164
Publication status Publié
Affiliation UCL
Keywords hard coatings ; cathodic arc ; ERDA ; XPS ; XRD
Links
Bibliographic reference Balaceanu, M ; Braic, M ; Macovei, D ; Genet, MJ. ; Manea, A ; et. al. Properties of titanium based hard coatings deposited by the cathodic arc method I. Microchemical and microstructural characteristics. In: Journal of Optoelectronics and Advanced Materials, Vol. 4, no. 1, p. 107-114 (2002)
Permanent URL http://hdl.handle.net/2078.1/42066