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Internal stresses in ultrathin oxide films: influence on growth and reliability
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Document type | Communication à un colloque (Conference Paper) – Conférence invitée / Keynote |
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Access type | Accès restreint |
Publication date | 2013 |
Language | Anglais |
Conference | "224th Meeting of the Electrochemical Society", San Francisco, USA (du 27/10/2013 au 01/11/2013) |
Affiliation | UCL - SST/IMMC/IMAP - Materials and process engineering |
Links |
Bibliographic reference | Van Overmeere, Quentin. Internal stresses in ultrathin oxide films: influence on growth and reliability.224th Meeting of the Electrochemical Society (San Francisco, USA, du 27/10/2013 au 01/11/2013). |
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Permanent URL | http://hdl.handle.net/2078.1/134369 |