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Thermal polarization and depolarization processes in BOX of SOI SIMOX structures
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| Document type | Communication à un colloque (Conference Paper) – Présentation orale avec comité de sélection |
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| Publication date | 1996 |
| Language | Anglais |
| Conference | "International Electrochemical Society meeting and Symposium on "Silicon-on-Insulator Technology and Devices"", Los Angeles (USA) (du 05/05/1996 au 10/05/1996) |
| Peer reviewed | yes |
| Host document | "Proceedings of the 7th International Electrochemical Society meeting and Symposium on "Silicon-on-Insulator Technology and Devices""- 302-310 |
| Publisher | P.L.F.Hemment |
| Publication status | Publié |
| Affiliation | UCL - FSA/ELEC - Département d'électricité |
| Keywords | SOI ; SIMOX structures |
| Links |
| Bibliographic reference | Nazarov, Alexei ; Barchuk, I.P. ; Kilchytska, Valeriya. Thermal polarization and depolarization processes in BOX of SOI SIMOX structures.International Electrochemical Society meeting and Symposium on "Silicon-on-Insulator Technology and Devices" (Los Angeles (USA), du 05/05/1996 au 10/05/1996). In: Proceedings of the 7th International Electrochemical Society meeting and Symposium on "Silicon-on-Insulator Technology and Devices", P.L.F.Hemment1996, p.302-310 |
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| Permanent URL | http://hdl.handle.net/2078.1/132844 |