Vlad, Alexandru
[UCL]
Melinte, Sorin
[UCL]
Dutu, Constantin Augustin
[UCL]
Bayot, Vincent
[UCL]
Matefi-Tempfli, Stefan
[UCL]
Nanoporous materials and templates have definitely settled the concept ofmass production of low dimensional structures. The major drawback that restricts their pervasive integration into real working devices is the mismatch between their dimensionality and today’s technological ability. For example, the hexagonal lattice is considered unsuitable for orthogonal arrangements required by the industry standard circuits. In this talk, we propose a general solution for the ultimate resolution processing of nanoporous templates. No overlay alignment is required to achieve single nanopore and subsequently nanowire resolution with probabilities as high as 92% upon proper modulation of the pattern mask size.
Bibliographic reference |
Vlad, Alexandru ; Melinte, Sorin ; Dutu, Constantin Augustin ; Bayot, Vincent ; Matefi-Tempfli, Stefan. Mathematics, statistics and single element resolution/processing in nanoporous templates..EP2DS-MSS (Kobe (Japan), du 19/07/2009 au 24/07/2009). |
Permanent URL |
http://hdl.handle.net/2078/120248 |