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Thick Macroporous Silicon Membranes: Influence of the Masking Layer on the Underetching Characteristics

Bibliographic reference Bassu, Margherita ; Scheen, Gilles ; Francis, Laurent. Thick Macroporous Silicon Membranes: Influence of the Masking Layer on the Underetching Characteristics. In: Sensors and Actuators A: Physical : an international journal devoted to research and development of physical and chemical transducers, Vol. 185, p. 66-72 (29/08/2012)
Permanent URL http://hdl.handle.net/2078.1/114312