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SiGe MEMS Accelerometers Combining a Large Bandwidth with a High Capacitive Sensitivity

Bibliographic reference Ray Chaudhuri, Ashesh ; Severi, S. ; Erismis, M/Akif ; Francis, Laurent ; Witvrouw, A.. SiGe MEMS Accelerometers Combining a Large Bandwidth with a High Capacitive Sensitivity.26th European Conference on Solid-State Transducers (Eurosensors 2012) (Krakow (Poland), du 09/09/2012 au 12/09/2012). In: Proceedings of the 26th European Conference on Solid-State Transducers (Eurosensors 2012), 2012
Permanent URL http://hdl.handle.net/2078.1/114310