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Sensing and MEMS Devices in Thin-Film SOI MOS Technology

Bibliographic reference Raskin, Jean-Pierre ; Francis, Laurent ; Flandre, Denis. Sensing and MEMS Devices in Thin-Film SOI MOS Technology. In: A. Nazarov et al. (eds.), Semiconductor-On-Insulator Materials for Nanoelectronics Applications, Engineering Materials, Springer-Verlag  : Berlin-Heidelberg 2011, p. 355-392
Permanent URL http://hdl.handle.net/2078.1/106451