New lab-on-chip fracture nanomechanical testing device for extracting properties of thin film materials : silicon nitride

Référence bibliographique Jaddi, Sahar. New lab-on-chip fracture nanomechanical testing device for extracting properties of thin film materials : silicon nitride. Ecole polytechnique de Louvain, Université catholique de Louvain, 2017. Prom. : Raskin, Jean-Pierre ; Pardoen, Thomas.
Permalien http://hdl.handle.net/2078.1/thesis:10702