Wideband On-chip antenna : design, fabrication and testing

This work present the design of a wideband on-chip antenna on silicon substrate and its capability of beamsteering, the fabrication and measurements results are also presented. An overview of the state of the art of on-chip antenna at higher frequencies in silicon based technology is provided, with an emphasis on the design benefits and challenges. The impact of three silicon based substrates on antenna performance is evaluated during fabrication and testing, the three considered substrate are standard silicon substrate, high resistivity and trap rich silicon substrate. Reflection and transmission coefficients are measured in Welcome lab, results show that the antenna achieve wideband propriety starting from 95 GHz. Simulations show a gain of 6.28 dB, an efficiency of -0.04 dB (99\%) and a bandwidth of 25.53 GHz.