Marichal, Raphaël
[UCL]
Raskin, Jean-Pierre
[UCL]
Pardoen, Thomas
[UCL]
Flandre, Denis
[UCL]
The trend towards miniaturization of electronic devices requires to evaluate the change of physical properties of materials at nanoscale. The present work aims at developing an on-chip laboratory devoted to put a silicon thin film specimen under biaxial loading, and to investigate the change of its materials properties. Finite elements simulations are used to derive convenient specimen designs, and to extract a set of dimensions allowing to sweep a range of strains from 0.001 to 0.04. Labs on-chip are then fabricated in cleanroom, using SOI technology.
Bibliographic reference |
Marichal, Raphaël. Enhancement of the optical properties of silicon devices through strain engineering. Ecole polytechnique de Louvain, Université catholique de Louvain, 2021. Prom. : Raskin, Jean-Pierre ; Pardoen, Thomas ; Flandre, Denis. |
Permanent URL |
http://hdl.handle.net/2078.1/thesis:33160 |