User menu

Accès à distance ? S'identifier sur le proxy UCLouvain

Search

Displaying 7 results.
    • Journal article
    Measurement and Characterization of Organic Contamination on Silicon Wafers and in Cleanrooms
    Storm, W Vandervorst, W Heyns, M Poleunis, Claude[UCL] Bertrand, Patrick[UCL] (1996) Clean Rooms International — , p. S10-S12 (02/1996)
    • BookChapter
    TOF-SIMS and XPS Chartacterization of Plasma Etch Residues on Cobalt Silicide Surfaces
    Storm, W Vandervorst, Wilfrid Vanhaelemeersch, S Baklanov, M Maex, K Poleunis, Claude[UCL] Bertrand, Patrick[UCL] (1997) Secondary Ion Mass Spectrometry SIMS X — [ISBN : 0-471-95897-2]
    • Journal article
    Extent of plasma damage to porous organosilicate films characterized with nanoindentation, x-ray reflectivity, and surface acoustic waves
    Jonas, Alain M.[UCL] Iacopi, F (2006) J. Mater. Res. — Vol. 21, p. 3161-3167 (2006)
    • Speech
    Integrated H.264 region-of-interest detection, tracking and compression for surveillance scenes
    Fernandez, I.A.[UCL] Rondao Alface, P. Gan, Tong Lauwereins, R. De Vleeschouwer, Christophe[UCL] (2010) IEEE Packet Video 2010 — Hong-Kong
    • Journal article
    Minimizing Plasma Damage and in situ Sealing of Ultra Low-k Dielectric Films by using Oxygen Free Fluorocarbon Plasmas
    Mannaert, G. Baklanov, M. R. Le, Q. T. Travaly, Youssef Boullart, W. Vanhaelemeersch, S. Jonas, Alain M.[UCL] (2005) Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures — Vol. 23, no. 5, p. 2198-2202 (2005)
    • Journal article
    Characterization of atomic layer deposited nanoscale structure on dense dielectric substrates by X-ray reflectivity
    Travaly, Y Schuhmacher, J. Hoyas, A. Martin Abell, T. Sutcliffe, V. Jonas, Alain M.[UCL] Van Hove, M. Maex, K. (2005) Microelectronic Engineering — Vol. 82, p. 639-644 (2005)
    • Journal article
    Advanced characterization : an indispensable tool for understanding ultra clean processing
    Vandervorst, W Bender, H Storm, W Heyns, M Poleunis, Claude[UCL] Bertrand, Patrick[UCL] (1995) Microelectronic Engineering — Vol. 28, p. 27-34 (1995)