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60 GHz tunable cavity resonator with an incorporated MEMS based small perturbation

Bibliographic reference Dancila, Dragos ; Ekkels, Phillip ; Simon, Pascal ; Jourdain, A. ; Phommahaxay, A. ; et. al. 60 GHz tunable cavity resonator with an incorporated MEMS based small perturbation.MEMSWAVE 2009 conference (Trento, Italy, du 06/07/2009 au 08/07/2009). In: Proceedings of the MEMSWAVE 2009 conference, 2009, p. 27-30
Permanent URL http://hdl.handle.net/2078.1/105826